Rotor Assembly · 00-685098-00
Rotor, Proteus · P-100
has picture Water Flow Switch · 71-625042-00
Kit, Retrofit Dual · 00-685045-00
Load Lock Manifold · 00-684375-00
Roller, Flat Aligner · 00-678302-01
Insulator · 00-641737-05
Mount, Clip Cylinder · 00-664343-00
Clamp · 00-664080-06
Cover, Blank Off · 00-664231-00
exchange item RF Match Box Assy. · 00-671684-01
exchange item RF Etch Head · 00-674880-00
has picture Pressure Plate RF Hue Bias · 00-685582-00
has picture Transfer Plate Assy., 5" · 00-674776-00
exchange item Heater Assy., 5" · 00-684878-00
has picture Bellows · 09-530119-00
Lock Cylinder Assy. W/Key · 00-670594-00
exchange item Source, Conmag Assy. · 00-664224-02
Shaft, LL Ram · 00-684096-00
Insulator, Etch Ring · 00-684291-00
Adapter, TC Gauge · 00-672017-00
TC, Vacuum · 00-672017-01
Tube, Inlet, Argon · 00-672117-00
Cassette Rail, Rear · 00-672813-00
T.C, Self Adhecive · SA1-J
Mask, CV, 5" · 00-677813-02
Air Filter Muffler · 00-671946-00
Insert Rail, Rear · 00-674274-00
Insert Rail, Front · 00-674275-00
Table Shield · 00-674330-00
exchange item Heater, DC Bias 5" · 00-685943-01
Roller, Flat Aligner · 00-678761-03
Roller, Flat Aligner · 00-678772-01
Roller, Flat Aligner · 00-678761-01
Floodlight, Large · 67-489007-00
Heater Sieve Trap · F2698301
L/L Ram Seal Plate · 00-664440-01
Tube, Assy. · 00-685918-00
Mask Assy. CV Upgrade · 00-677908-06
Insert, Perforated · 00-678477-01
Screen, AY Millitorr · 00-626269-00
Argon Tube Assembly · 00-678635-01
Wafer Lifter, 6" · 00-680534-00
Mesh Trap · 00-685579-00
Blank Off, Source · 00-680616-00
Plate, L/L Ram Seal · 00-680074-02
Cassette Rail Insert, Front · 00-680918-00
Cassette Rail, Front · 00-680919-00
Cassette Rail Insert, Rear · 00-680920-00
Screen · 00-681084-00
Heat Distribution Plate · 00-682547-00
Insulation Material, Heater · 00-682550-00
Insulator, RF Ceramic · 00-682884-00
Screen, Hi-Vac Valve · 00-683293-00
Insert, Table, RF Etch · 00-683445-04
Panel · 00-683695-01
Plt Mounting · 04-709285-01
Screen, L/L ISO Valve · 00-684408-00
Screen, L/L · 00-684689-00
has picture exchange item Rotational Feedthru · 00-684755-00
Cap, Ignitor · 00-677829-02
Light, Assembly KWR · 00-685388-00
Shield, Ceramic, Heater T.C. · 00-685917-00
Bar Pallet · 00-688156-00
Molecular Sieve Material · 27-320035-00
Bellows, Seal Body · 04-710424-01
Insert Clip Ring · 04-714075-01
Wafer Lifter Arm · 10-98800-01
Bellows, Assembly · 1281-187838-301
Hex Nut, 8, SS · 13-122008-00
Master Link 3/8 · 20-479930-00
Belt, Plastic Drive · 20-480029-00
Key · 22-999783-00
Plunger, Vilier · 22-999842-00
Line, Argon, ViPS · 28-200704-00
Hose Clamp · 28-993144-00
exchange item Pump, Turbo, Varian · V-200A
Cover, Transducer Back · 71-625047-00
Manual Valve · 951-5091
Oil, TA, Turbo · 969-9901
5" Flange Extension · 952-5048
Cassette Rail Front · 00-672814-00
Wafer Load Door, 5" · 00-684170-00
Wafer Lifter, 5" · 00-674691-00
has picture Heater, 3290 5" SST · 04-716542-01
Absorber, Ebara · 31302000
Pump, Cryo FS-8 · 03-230055-00
Cryo Pump Hose · 3130020E
Array, 1st Stage · 07-601429-00
Regulator, 0-30 PSI · 41500777
Spray Lubricant · G-n
Plate, Temperature · 101-4-177C
TC, Vac Gauge · 270006
Trap, RST-40V · 99-171-137
Kit, Water Pump 1050 Cyropanel · 8080021K001
Kit, Water Pump 1050 Cyropanel · 8080021K002
Kit, Water Pump 350 Cyropanel · 8080021K003
Filter Valve · 80250K031
Kit, Rebuild 15K Array · 8080002K010
Regulator, Pressure, L/L Valve · SP2339-1
Fan · SU2A5
Felt, Oil Reserve · PM033759-T
has picture Wafer Stop Blade, 5" · 00-678302-02
Pressure Plate, Assy. · 00-684169-00
has picture Wafer Pick Up · 00-678317-01
exchange item Heater Assy., 5" SST · 00-685996-00
Pressure Plate Assy. · 00-683162-00
Transfer Plate Assy. · 00-683141-01
has picture Insulator, Anode · 00-664167-00
has picture Insulator, Cathode · 00-664166-00
has picture Belt, Timing · 20-480079-00
Gas Feed Transition Tube · 00-677955-01
Cassette, Wafer 4" · 00-664394-00
has picture Table, Insert. 5" · 00-674830-00
has picture Screen, Cryo Pump · 00-674850-00
has picture Bellows, LL Ram · 00-678274-01
has picture Wafer Stop Blade, 6" · 00-678304-02
has picture Insulator, Mini-Qtm · 04-712078-02
has picture Tube Assy, Flex, Etch · 00-678552-01
Cassette, 6" Wafer · 00-681359-00
has picture Insert, External Pole Piece · 00-682232-00
has picture Insert, Middle Pole Piece · 00-682237-00
Insulator, 6" Heater · 00-682548-00
Insulator, Pressure · 00-674827-00
has picture Wafer Stop Blade, 5" SST · 00-674693-00
Motor, DC · 73-410205-00
has picture Wafer Stop Blade, 4" · 00-678303-02
Kit B · 00-672744-00
Tube, Ion Gauge · K2500-301
has picture Belt, Timing · 20-480081-00
has picture Heater Element, 6" · 73-290938-00
has picture Cassette, Wafer 5" · 00-684088-00
has picture Cooling Band, Outer · 00-682205-00
has picture Cooling Band, Inner · 00-682211-00
has picture Tube Assy, Flex Etch · 00-678552-02
Rebuild Kit, Valve · 33-0119