Cable Assy. · 00-685209-00
Cable, Reset, Power Fail · 00-666409-00
Transformer, Power Supply · 44-149146-00
exchange item Phase Discramenator Discr. · 00-666315-00
Motor, Drive Assy. · 00-669840-00
Cable, Convection Tube · 00-671720-00
Cable, RF Bias · 00-673089-00
Cable Assy. · 00-674987-00
Cable, Assy Auto Zero · 00-685210-00
Cable, Etch Ring · 00-666435-01
Cable, Assy Coax · 00-672419-02
Cable, Assy · 00-672072-00
Fitting, Blank · 00-674625-00
Port, Sight Flange · 04-673518-00
Cable, Conmag 26 ft. · 00-680781-04
Meter, Panel 3Kw · 00-673395-00
Circuit Breaker, 20A · 55-700397-00
RF Filter Assembly · 00-685100-00
has picture exchange item Firing Module · 00-674413-00
Heater Transformer Assy. · 00-685759-01
Cable, 26 Pin · 00-671898-16
Cable Assy. · 00-677664-00
Meter, Panel 15kW · 00-673275-00
Cable Assy. · 00-674358-02
Cable Assy. · 00-674359-02
Cable Assy. · 00-674359-04
Cable Assy. · 00-674358-01
Cable Assy. · 00-674358-05
Cable Assy. · 00-674359-01
Switch, Vacuum 15" · 00-674929-01
Cable, Dbl End · 00-685454-00
Connector · 53-965903-00
Meter, Panel 3kW · 00-606098-00
Diode · 31-223137-00
Meter, 0-25 · 00-684442-00
Meter 15kv Small Body · 00-684735-00
Transformer · 00-685422-00
Motor, Transfer Plate · 00-685511-00
Kit, Proximity Switch Retro-Fit · 04-716925-01
Relay, Solid State · 00-685529-00
Gauge, Vacuum TC · F0472303 - 0531
Cable, Ceramic Bead · 04-716946-02
Fan, Cooling, Electronics Rack · 20-839934-00
Thermocouple, Heater · 27-180262-00
Switch, Reed · 27-999734-00
Fuse, 2A 500V · 55-500053-00
Fuse, 60A 600V · 55-500300-00
Fuse, 35A 600V · 55-500302-00
Fuse, 100A 700V · 55-500384-00
Sensor, Slow/Stop · 66-601004-00
Sensor, Light Source · 66-601005-00
Fuse, 12A · 67-119057-00
Switch, Micro · 71-429924-00
Switch, Thermostatic · 71-629943-00
Switch, Air Flow · 71-699124-00
Switch, Contact · 71-999738-00
Relay, R-10 · 72-106029-00
Relay, Motor Timing · 73-409318-00
has picture Photo Amplifier · 78-197050-00
has picture Photo Detector Assy. · 00-685295-00
Sensor, Bridge Coil · 00-666164-00
Cable Assy. · 00-674981-00
Meter, 15 KW · 04-718753-03
Meter, Panel 2-KV · 00-684733-00
TC, Vacuum · 27-229907-00
exchange item Controller, Motor Transfer Plate · 00-666255-00
Meter, KWH, 3 Station · 04-715634-01
Gauge, TC · 810-2
exchange item Controller, Ion Gauge · 845
has picture exchange item Controller, Multigage · L8350301
exchange item Controller, Ion Gauge · 880
Seal, Bellows · 00-600055-01
O-Ring, Chamber 3180 · 00-674856-00
O-Ring Retaining Tool · 00-687127-01
O-Ring Vac Kit · 00-694788-01
O-Rings · 09-530017-00
O-Ring · 27-402265-00
O-Ring · 27-402382-00
O-Ring · 27-402463-00
O-Ring · 27-402625-00
O-Ring Drive Belt · 27-402746-00
O-Ring, Main Seal · 27-403021-00
O-Ring Bonnet Seal · 27-403029-00
Seal, Rubber · 27-459600-00
Quad Ring · 27-459655-00
O-Ring, Four Lobed · 27-459656-00
O-Ring, Four Lobed · 27-459657-00
Gasket, Indium · 00-659454-00
Screw, Shoulder, 3/8L · 41424
TC Cable · 00-674378-00
Hose Cooling Kit, H2O · 00-672216-00
has picture Sprocket, Weldmont · 00-664011-00
Spacer Guide, 5" · 00-671123-00
Clamp, Swivel · 22-999809-00
Gage, Block Act. Clip · 00-671294-00
Wafer Clip Block Gage · 00-671295-00
L-Handle Jack · 00-671639-00
Rack Cover Support · 00-680981-00
Wafer Clip · 00-672057-00
Valve Blocking Plate · 27-179859-00
has picture Clamp, Shutter, Weldmont · 00-672401-00
Shutter, Actuator · 00-685405-00
Centering Ring, St. Steel · KC-16-SV
Tool, Clip Actuator · 00-673156-00
Cable, Light SKT · 00-685481-00
Spring · 04-715875-01
Screws, Set · 00-673941-00
Bushing · 21-139921-00
Screw, 10-32x1/4 Hex Hd. · 00-673943-00
Shim · 00-671323-00
Rod Mount · 00-674933-00
Spring, Ceramic Ring Retainer · 00-674493-01
Spring, Retainer · 00-674494-01
Screen · 04-710636-01
Filter · 27-590969-00
Shim · 00-680559-00
Gland · 00-674897-00
Gasket, Copper · 09-535070-00
Gasket, 4 1/2" Copper · 09-535015-00
Pin, Door · 00-664309-00
Spacer, Flat Aligner · 00-671122-00
Spring · 27-790201-00
Clamp, Perforated Shutter · 00-678475-01
conector, clamp · 51-969725-00
Support Insert · 00-678476-01
Gasket, Copper · 27-459860-00
Spindle · 00-664367-00
Detent Bracket, Support · 00-680563-00
Screw, Capture, Mini-Qtm · 04-715871-03
has picture Filament, RF · 00-680734-00
Bead, Ceramic · 24-813008-00
Clamp · 00-680756-00
Clamp · 00-680757-00
Screen, Ion Gauge · 00-656161-00
has picture Magnet, Conmag I · 00-678859-01
Spacer, Coil · 00-682266-00
Bushing, 1/4 x 1/8 · 28-202011-00
Screw · 11-612014-012
Screw, 10-32 x 1/2 Pan Hd Phil · 12-222060-08
Screw, 1/4-20 x 3/4 Soc Hd · 12-312014-12
Shutter Key · 00-684648-00
Screw, 1/4-20 x 1 Soc Hd · 12-312014-20
Screw, 5/16-18 x 1 1/2 Soc Hd · 12-312015-24
Screw, 10-32 x 1/2 Flt Hd Phil · 12-212060-06
Screw, 6-32 x 1/4 Pan Hd Slt · 12-162006-04
Screw, 6-32 x 1/4 Pan Hd Phil · 12-222006-04
Screw, 4-40x1/8 Soc Hd · 00-673940-00
Hex Nut, 10, Slip Washer · 13-312060-00
Washer · 14-112015-00
Ferrule, Comp. 1/4" · 28-694006-00
Ferrule, Teflon 5/16" · 28-694578-00
Washer, Plain Shim · 14-900054-00
Washer, #6 · 14-122006-00
Washer, Split · 14-212006-00
Washer, Split · 14-212010-00
Vented Screw · 00-685018-00
Washer, Split · 14-212014-00
Washer, Split · 14-212015-00
Screen · 00-685019-00
has picture Clamp, Conmag Shutter · 00-685403-00
Chain, Drive, Transfer Plate · 00-685508-00
Foreline Trap · 00-685578-00
Bolt, Shoulder · 00-689136-01
Chain, Cassette Drive · 04-710791-01
VCR, "T" Weldmont · 04-712042-01
has picture Spring, P/P Ram Shield · 04-712157-02
Spring, L/L Ram Shield · 04-716733-01
Filament, Hot · 04-717629-01
Gaskets, Copper · 09-535014-00
Gaskets, Copper · 953-5070
Screw, Hex Head, 10-32X3/8 · 12-752060-06
Screw · 12-900511-00
Washer #8 SS · 14-122008-00
Washer, Split · 14-202008-00
Washers, Teflon · 14-999709-00
Cotter Pins · 19-222992-00
Roll Pin · 19-224763-00
Roll Pin · 19-224820-00
Pin, Quick Release, L/L Ram · 19-229899-00
Ball Bearings · 21-109596-00
Ring, Retainer · 22-678311-00
Ring, Retaining · 22-678602-00
Gasket, RF Chamber Gnd · 27-459874-00
Cap, Cajon · 28-200012-00
Fitting, 90 Street, Elbow · 28-205994-00
Fitting, 3/8mpt x 3/4 Flare, Elbow · 28-611018-00
Fitting, 1/4mpt x 1/4 Flare · 28-626907-00
Fitting, 5/16 x 1/4 Elbow · 28-666986-00
Fitting, Elbow 1/4mpt x 1/4fpt · 28-694052-00
Fitting · 28-695039-00
Fitting, Union, 1/4h x 1/4flr · 28-849913-00
Fitting, Union 1/4 x 1/4 · 28-849954-00
Drive Limit, Right Angle · 7055000-01
Clamp · 800-02-40
Bearing · 8FK6301J
Bellows, SS 1 1/2 · 953-0119
Screw, Pressure Relief · 12-999835-00
Pin, L/L Ram · 00-664444-00
Sprocket, Weldment · 00-664068-00
Chain, Cassette · 00-674029-00
Chain Assy. · 00-684056-04
Turnbuckle · 00-672232-00
Roller, Flat Aligner, Ceramic · 00-664366-00
Kit, Retrofit Dual · 00-685045-00
Load Lock Manifold · 00-684375-00
Roller, Flat Aligner · 00-678302-01
Insulator · 00-641737-05
Mount, Clip Cylinder · 00-664343-00
Clamp · 00-664080-06
Cover, Blank Off · 00-664231-00
exchange item RF Match Box Assy. · 00-671684-01
exchange item RF Etch Head · 00-674880-00
has picture Pressure Plate RF Hue Bias · 00-685582-00
has picture Transfer Plate Assy., 5" · 00-674776-00
exchange item Heater Assy., 5" · 00-684878-00
has picture Bellows · 09-530119-00
Lock Cylinder Assy. W/Key · 00-670594-00
exchange item Source, Conmag Assy. · 00-664224-02
Shaft, LL Ram · 00-684096-00
Insulator, Etch Ring · 00-684291-00
Adapter, TC Gauge · 00-672017-00
TC, Vacuum · 00-672017-01
Tube, Inlet, Argon · 00-672117-00
Cassette Rail, Rear · 00-672813-00
T.C, Self Adhecive · SA1-J
Mask, CV, 5" · 00-677813-02
Air Filter Muffler · 00-671946-00
Insert Rail, Rear · 00-674274-00
Insert Rail, Front · 00-674275-00
Table Shield · 00-674330-00
exchange item Heater, DC Bias 5" · 00-685943-01
Roller, Flat Aligner · 00-678761-03
Roller, Flat Aligner · 00-678772-01
Roller, Flat Aligner · 00-678761-01
Floodlight, Large · 67-489007-00
Heater Sieve Trap · F2698301
L/L Ram Seal Plate · 00-664440-01
Tube, Assy. · 00-685918-00
Mask Assy. CV Upgrade · 00-677908-06
Insert, Perforated · 00-678477-01
Screen, AY Millitorr · 00-626269-00
Argon Tube Assembly · 00-678635-01
Wafer Lifter, 6" · 00-680534-00
Mesh Trap · 00-685579-00
Blank Off, Source · 00-680616-00
Plate, L/L Ram Seal · 00-680074-02
Cassette Rail Insert, Front · 00-680918-00
Cassette Rail, Front · 00-680919-00
Cassette Rail Insert, Rear · 00-680920-00
Screen · 00-681084-00
Heat Distribution Plate · 00-682547-00
Insulation Material, Heater · 00-682550-00
Insulator, RF Ceramic · 00-682884-00
Screen, Hi-Vac Valve · 00-683293-00
Insert, Table, RF Etch · 00-683445-04
Panel · 00-683695-01
Plt Mounting · 04-709285-01
Screen, L/L ISO Valve · 00-684408-00
Screen, L/L · 00-684689-00
has picture exchange item Rotational Feedthru · 00-684755-00
Cap, Ignitor · 00-677829-02
Light, Assembly KWR · 00-685388-00
Shield, Ceramic, Heater T.C. · 00-685917-00
Bar Pallet · 00-688156-00
Molecular Sieve Material · 27-320035-00
Bellows, Seal Body · 04-710424-01
Insert Clip Ring · 04-714075-01
Wafer Lifter Arm · 10-98800-01
Bellows, Assembly · 1281-187838-301
Hex Nut, 8, SS · 13-122008-00
Master Link 3/8 · 20-479930-00
Belt, Plastic Drive · 20-480029-00
Key · 22-999783-00
Plunger, Vilier · 22-999842-00
Line, Argon, ViPS · 28-200704-00
Hose Clamp · 28-993144-00
exchange item Pump, Turbo, Varian · V-200A
Cover, Transducer Back · 71-625047-00
Manual Valve · 951-5091
Oil, TA, Turbo · 969-9901
5" Flange Extension · 952-5048
Cassette Rail Front · 00-672814-00
Wafer Load Door, 5" · 00-684170-00
Wafer Lifter, 5" · 00-674691-00
has picture Heater, 3290 5" SST · 04-716542-01
Air Cylinder Rebuild Kit · 00-653460-00
Cylinder, Air · 00-672796-00
Cylinder, Air · 04-714147-01
Cylinder, Air · 27-999664-00
Cylinder, Assy., L/L Ram · 00-672859-01
Actuator, Shutter · 00-683405-00
BTA Valve Kit · 09-530090-00
Cylinder, Air · 27-999600-00
Dual Action Cylinder · 27-999650-00
has picture Cylinder, Air, 9" · 27-999658-00
Air Cylinder · 27-999665-00
Muffler, Pneumatic 1/4 npt · 27-999700-00
exchange item PCB, Relay · 00-685712-00
exchange item PCB, RF Match · 00-657967-00
exchange item PCB, 20 Input Sensor · 00-666082-00
exchange item PCB, Audio Output · 00-684572-00
exchange item PCB, Power Supply · 00-666361-00
PCB, Output Vac. System · 00-663527-00
exchange item PCB, Octal Relay · 00-668552-00
exchange item PCB, 10 Input · 00-666055-00
exchange item PCB, Input Board · 00-663529-00
exchange item PCB, Control, Wide Range · 00-666368-00
exchange item PCB, Argon Interface · 00-684041-00
PCB, Reset Control · 00-663535-00
exchange item PCB, Argon Pressure · 00-684037-00
exchange item PCB, Power Fail · 00-666052-00
exchange item PCB, Relay Control · 00-668550-00
exchange item PCB, Audio Output · 00-684570-00
exchange item PCB, Thin Film Head · 00-684584-00
exchange item PCB, GPIB Interface · 00-666079-00
exchange item PCB, Isolated Control Interface · 00-674639-00
exchange item PCB, Power Supply · 44-149146-00
exchange item PCB, Input · 00-666004-00
exchange item PCB, Output · 00-666007-00
exchange item PCB, Sensor Interface · 00-666085-00
exchange item PCB, Cassette Motor Control · 00-666196-00
exchange item PCB, Isolator Control · 00-666199-00
exchange item PCB, Wafer Status · 00-666208-00
exchange item PCB, Wafer Transfer · 00-666211-00
exchange item PCB, Servo Control · 00-666273-00
exchange item PCB, Relay Driver · 00-666291-00
exchange item PCB, Power Control, 12kW · 00-666355-00
has picture PCB, Output Control · 00-671786-00
exchange item PCB, Water Flow, 2.5 gpm · 00-671879-00
exchange item PCB, Water Flow, .25 gpm · 00-671880-00
exchange item PCB, RF Etch Monitor · 00-673526-01
exchange item PCB, Interlock Stop · 00-678450-01
exchange item PCB, Power Control 3kW · 00-686082-00
exchange item PCB, Impedance Interface · 00-680682-00
exchange item PCB, Power Indicator · 00-684661-00
exchange item PCB, Relay, Time Delay · 71-625025-00
Gage, Shield · 00-671683-00
has picture Shield, Inner Isolation · 00-685964-00
Shield, Seal Plate · 00-664447-00
Shield, Heater Blank Off · 00-684879-00
Shield, RF Etch, 5" · 00-685053-00
has picture Shield, Anode · 00-664267-00
Shield, Ram Bellows · 00-664282-00
Shield, P/P Ram · 00-684320-00
Shield, L/L Particle Reduction · 00-680035-01
Shield, RF Etch Ring · 00-674836-00
Shield, Front Plate · 00-664347-00
Shield, Screw Cavity · 00-683521-02
Shield, Upper Chamber, 2 pcs · 04-716736-01
Shield, Rear Plate · 04-712093-03
Shield, 5" P/P Cavity · 00-674780-00
has picture Shield, Ceramic Ring 4" · 00-677895-01
has picture Shield, Dark Space · 04-715876-01
Clip · 00-677815-01
Shield, Cavity · 00-678216-00
Shutter · 00-678474-00
Sheild, Cross Contamination · 00-685957-00
Ion Gauge Baffle · 04-716545-01
Shield, P/P Cavity · 04-717627-01
Shield, Baffle · 04-711877-01
Shield, Preheat Cover · 00-681028-00
has picture Shield, Load Lock · 00-678067-01
Shield, RF Igniter Flange · 00-681176-00
Shield, Ceramic Ring, 6" · 00-683707-01
has picture Shield, Heater Flange · 00-684747-00
Kit, CV Mask, 5" · 00-677908-06
has picture Shutter · 00-685485-00
Table Shield 5" · 00-685951-00
Shield, ViPS Can · 04-710446-06
Shield, P/P Ram w/Insert · 04-712094-01
Shield, L/L Ram w/Insert · 04-712094-02
Shield, L/L Ram Cone · 04-712159-01
Shield, Center Ram · 04-712188-01
Shield, Upper Chamber · 04-712190-01
Shield, Screw · 04-712209-01
Shield, Dark Space · 04-715761-02
Shield, Lower Chamber · 04-717647-01
Shield, Feedthru, ViPS · 04-717624-00
Feedthru, Filament · 04-717624-01
Shield, Filament Feedthru · 04-717625-01
Shield, 6" RF Cover · 04-721165-01
Feedthru, Rotary Shutter · 28-274973-00
Feedthru, Hi-Voltage 12kV · 954-5119
Valve, Needle · 951-509
Valve, Argon Kit · 00-672243-00
Valve, Needle · 27-180250-00
has picture Valve, 11/2" Pneumatic · 00-684383-00
Valve, Argon Pressure · 00-674923-00
Valve, Solenoid, 120V · 27-179903-00
has picture Valve, Needle Etch Head · 00-678619-01
Valve, Manifold Assy. · 00-674567-00
Valve, Needle, Preheat · 04-720432-01
Solenoid, Kit · 1291-6267-71-190
Valve, Subbase 231B · 27-179818-00
has picture Valve, Flow Control · 27-180254-00
Valve, Needle · 27-180475-00
Valve, Needle · 27-180476-00
Valve, Pressure Relief · 04-716531-01
Valve, Needle 1/4 Straight · B-45G
Valve, Hi-Vac · Q1089-305
Valve, Hi-Vac · X9-515229-00
exchange item Power Supply, SUDC · 00-672250-00
exchange item Power Supply, 6KW · 00-681049-00
exchange item Power Supply, 12KW · 04-722791-01
Power Supply · 04-717511-02