has picture Sensor, Drive Motor · 04-716650-01
has picture Sensor, Prox. Switch · 00-678149-01
Heater Element 5" · 00-672255-00
has picture Sensor, Wafer · 00-674685-00
Sensor, Drive Motor Assy. · 00-674704-00
Ribbon Cable · 00-674948-00
Switch, Actuator · 71-999885-00
Switch, Micro · 71-249829-00
Fuse Kit · 62-010004-00
has picture Motor, Wafer Handler · 00-684049-00
Cable · CB2151/248
has picture Rotation Sensor · 04-707856-03
has picture Switch, Reed Assy. · 00-678618-01
Heater Element, 4" · 00-672256-00
has picture Cable, Ion Gauge, 845 · 27-299955-00
O-Ring · 27-409334-00
Seal, Rubber · 00-953009-30
Door O-Ring, 3290 · 00-683302-00
Quad Ring · 27-459663-00
Gasket, Viewport · 00-643545-02
has picture Cooling Pole Assy. · 00-672905-00
Screw, Nylon · 12-900906-00
Screw, Modified · 04-712210-02
has picture Anti-Rotation strap · 00-672257-00
has picture Sensor Cap · 00-674682-00
has picture Thrust Washer · 00-672448-00
Clip Ring SST, 5" · 00-678087-02
has picture Spring, Retainer 5" Htr · 04-712265-01
has picture Spring, Retainer 4" Htr. · 04-715838-01
has picture Sprocket, Idler · 00-674101-00
has picture Extension Shaft · 04-707854-01
Screw, 8-32x1/2 Soc Hd · 12-312008-08
Washer # 10 · 14-102010-00
Screw, 10-32x5/16 Soc Hd · 12-312060-05
Screw, 10-32x3/8 Soc Hd Vtd. · 12-600024-00
Screw, 10-32x5/16 Hex Hd, Trimmed · 12-752060-05
Screw, Vtd 6-32x1/4 Soc Hd · 12-600023-00
Screw, Vtd 4-40x1/8 Soc Hd · 00-600067-00
Screw, Set 4-40x1/4 · 11-652004-04
Screw, 6-32x3/8 Vntd Pan · 12-600022-00
Screw, Hex Hd 10x32x1/4 · 12-752060-04
has picture Sprocket Assy. · 00-681153-00
Screw, Vntd 10-32x5/16 Soc Hd · 12-600025-00
Screw, Vntd 10-32x5/16 Hex Hd · 12-600025-02
Screw, 10-32x7/16 Soc Hd · 12-600034-00
Screw, Vntd 4-40x3/16 Soc Hd · 12-600088-00
Screw, 4-40x3/16 Soc Hd · 12-600067-00
Screw, 6-32x1/4 Soc Hd · 21-752006-04
Screw, 10-32x5/16 Soc Hd · 12-312060-05
Screw, 10-32x1/2 Flt Hd Phil · 12-112060-08
Screw, 10-32x1/2 Soc Hd · 12-752060-08
Screw, 8-32x3/16 Hex Hd. Trimmed · 12-752008-03
Screw, 10-32x3/8 Soc Hd · 12-751060-06
Screw, 1/4-20x5/8 Soc Hd · 12-312014-10
Screw, 4-40x1/8 Soc Hd · 12-312004-02
1/4x20 Screw, Shoulder · 12-999862-00
Screw, Vntd 4-40x1/2 Pan Hd Slot · 4-40 x 1/2
Screw, Vntd 4-40x1/8 Soc Hd · 4-40 x 1/8
Screw, 1/4-20x1 Soc Hd · 1/4-20 x 1
Screw, 10-32x1/2 Hex Hd · 10-32 x 1/2
Screw, Vntd 6-32x1/4 Soc Hd · 6-32 x 1/4
Screw, Vntd 8-32x1/4 Soc Hd · 8-32 x 1/4
Screw, 8-32x1/4 Flt Hd Phil · 8-32 x 1/4
Screw, 8-32x1/2 Soc Hd · 8-32 x 1/2
Screw, 10-32x1/4 Hex Hd · 10-32 x 1/4
Screw, 1/4-20x3/6 Soc Hd · 1/4-20 x 3/6
Screw, Vntd 10-32x3/8 Hex Hd · 10-32 x 3/8
Screw, 6-32x1/4 Pan Hd Phil · 6-32 x 1/4
Set, Screw/Nut 1/4-20 x 3/4 · 953-5044
Washer, Turner · 00-684046-00
Bearing, Needle · 21-128808-00
Wire, Filament Tungsten · 00-680992-00
has picture Spring, Retainer 6" Htr · 04-712167-01
Screw, Flat Head, 1/2x20 · 12-333968-56
has picture Cooling Band Assy., Conmag · 00-664257-01
Inserts, Transfer Plate · 00-664443-00
has picture Magnet, Mini-Quantum Assy. · 04-716498-01
has picture Insulator, Table, 5" · 00-674826-00
has picture Tube, Heat Exchanger Inlet · 00-664268-01
has picture Clip Ring SST, 6" · 00-678087-04
Insert, Central Pole Piece · 00-682229-00
has picture Hub, Modular · 04-709833-01
has picture Shaft, Rotor · 04-707628-01
has picture Bearing, Seal Assy., Qtm · 04-709847-01
Collar · 04-707848-01
Screw, 4-40x5/8 Vtd · 12-600062-00
Anti-Rotation Strap, 3290 · 00-683166-00
Screw, Vntd, SCH, 8-32X875 · 12-600056-00
Screw, Vnt, 8-32x1/4 FHP · 12-600020-00
Screw, Shoulder · 12-999541-00
Bearing, B-67 · B-67
has picture Anode, Conmag · 00-664178-00
has picture Transfer Plate Diamond Pin · 00-664274-00
Ram Pad · 04-712188-02
Screw, Socket Hd., 3/8-16x1 · 12-312016-20
Set Screw, 6-32x1/4 · 11-622006-04
Ball Bearing · 21-109605-00
Ram Pad · 04-712186-02
Spring Plunger · 22-999967-00
has picture Insulator, 4" Etch Ring · 00-684270-00
Roll Pin · 19-224954-00
Chain, Transfer Plate 3290 · 00-685508-04
Roll Pin · 19-224762-00
Roll Pin · 19-224968-00
has picture Wafer Lifter Stop · 00-680524-00
Brass Bushing · 14-999775-00
Roll Pin · 19-224978-00
Ring Retainer · 22-678967-00
Roll Pin · 19-224774-00
has picture Roller, Flat Aligner · 00-678772-03
Bearing, Thrust · 00-680917-00
has picture Wafer Stop Blade, 5" · 00-678302-02
Pressure Plate, Assy. · 00-684169-00
has picture Wafer Pick Up · 00-678317-01
exchange item Heater Assy., 5" SST · 00-685996-00
Pressure Plate Assy. · 00-683162-00
Transfer Plate Assy. · 00-683141-01
has picture Insulator, Anode · 00-664167-00
has picture Insulator, Cathode · 00-664166-00
has picture Belt, Timing · 20-480079-00
Gas Feed Transition Tube · 00-677955-01
Cassette, Wafer 4" · 00-664394-00
has picture Table, Insert. 5" · 00-674830-00
has picture Screen, Cryo Pump · 00-674850-00
has picture Bellows, LL Ram · 00-678274-01
has picture Wafer Stop Blade, 6" · 00-678304-02
has picture Insulator, Mini-Qtm · 04-712078-02
has picture Tube Assy, Flex, Etch · 00-678552-01
Cassette, 6" Wafer · 00-681359-00
has picture Insert, External Pole Piece · 00-682232-00
has picture Insert, Middle Pole Piece · 00-682237-00
Insulator, 6" Heater · 00-682548-00
Insulator, Pressure · 00-674827-00
has picture Wafer Stop Blade, 5" SST · 00-674693-00
Motor, DC · 73-410205-00
has picture Wafer Stop Blade, 4" · 00-678303-02
Kit B · 00-672744-00
Tube, Ion Gauge · K2500-301
has picture Belt, Timing · 20-480081-00
has picture Heater Element, 6" · 73-290938-00
has picture Cassette, Wafer 5" · 00-684088-00
has picture Cooling Band, Outer · 00-682205-00
has picture Cooling Band, Inner · 00-682211-00
has picture Tube Assy, Flex Etch · 00-678552-02
has picture Cylinder, Clip Actuator · 00-664345-00
has picture Bellows, Ram Shaft Assembly · 00-672852-00
has picture Cylinder, Air, 5" · 00-678319-01
has picture Bellows, Ram Assembly · 00-680909-00
Cylinder, Plastic Door · 00-683772-01
has picture Bellows, Ram · 00-664286-00
has picture Bellows, P/P Ram · 00-684095-00
has picture Valve, BTA · 00-677596-00
has picture Cylinder, Air · 27-999740-00
has picture Pump, Venturi · 00-670615-00
Cylinder, Air · 00-678794-01
has picture Cylinder, L/L Ram 3290 · 04-714954-01
has picture Vacuum Generator · 27-309504-00
has picture PCB, Proteus Water Flow · 04-146378-00
Shield, Lower Isolation · 00-685936-00
has picture Shield, Long · 00-685938-00
has picture Shield, ST2-3L · 00-685957-01
Shield, Secondary · 00-674846-00
has picture Shield, Front Plate, 2 pcs · 00-664337-00
has picture Shield, Rear Plate · 00-664119-00
has picture Shield, RF Etch, inner · 00-671954-00
has picture Shield, Outer Pole Piece · 00-672313-00
has picture Shield, Conmag Combo · 00-673816-00
has picture Anode Cap · 00-674163-00
has picture Shield, ST3-4S · 00-685937-01
has picture Ceramic Clip Ring, 5" · 00-674782-00
Shield, 5" Heater, Mini-Qtm · 04-712263-01
has picture Insert, Table RF 4" · 00-674281-00
Shield, 5" Heater Bore Mini-Qtm · 04-712264-01
has picture Ceramic Clip Ring, 5" CV · 00-677814-02
Shield, RF Etch Cover · 00-680703-00
has picture Shield, 4" P/P Cavity · 00-664219-00
has picture Shield, ST2-3S · 00-685958-00
Shield, Conmag Modified · 00-684278-01
has picture Shield, Conmag Modified · 00-684278-02
has picture Shield, Anode Cover · 00-664198-01
Shield, Ceramic Ring · 00-684145-01
has picture Shield, Heater Bottom · 00-684725-00
Shield, Heater Bottom · 00-684728-00
has picture Ceramic Clip Ring , 6" · 00-682216-00
has picture Shield, Heater 4" · 00-684718-00
Shield, Ceramic Ring, 5" · 00-684145-00
has picture Shield, Conmag · 00-684278-00
has picture Shield, Split Clamp Ring · 00-684281-00
Weldmont, P.P. Shield · 00-684325-00
has picture Shield, Heater, 5" · 00-684748-00
Kit, Shields, Aluminum · 00-674780-02
has picture Ceramic Clip Ring, 4" · 00-674505-00
has picture Shield, Heater, 5" W/Flange · 00-684748-02
has picture Shield, Table, W/O Slit · 00-685951-01
has picture Shield, Pressure Plate · 00-685965-00
has picture Shield, 6" Heater Bore · 04-712165-01
has picture Shield, Conflat Hole · 04-712083-01
has picture Shield, P/P Ram Tip · 04-712156-01
has picture Collar, P/P Ram Pad · 04-712186-01
has picture Shield, 6" Heater · 04-712199-01
has picture Shield, Shutter, F/T · 04-712083-03
has picture Shield, NC · 04-714049-02
has picture Shield, Cavity, 6" · 04-715865-01
Shield, Pressure Plate · 04-715866-01
has picture Ring Assy., Etch 5" · 00-684694-00
Shield, RF Etch · 00-680701-00
Shield, Heater 6" · 04-712166-01
Shield, 5" Ceramic Ring · 00-677842-01
has picture Shield, Outer Support · 00-682938-00
Shield, P/P Weldment 4" · 00-684257-00
Shield, Heater Bore 5" · 04-716544-00
has picture Shield, Heater Bore 3290 5" · 04-716544-01
has picture Shield, Exterior Source 3280 · 00-680902-01
has picture Shield, Pressure Plate, 3280 · 04-716410-02
Shield, 6" Cavity Shield, 3280 · 00-680574-00
has picture Shield, Screw · 00-681395-00
Shield, Pressure Plate, Qtm · 04-721198-01
has picture Shield, Belly Conmag II · 04-712161-01
has picture Shield, No ViPS · 04-712083-02
has picture Shield, Load Lock · 00-678638-01
has picture Shield, Front Plate, 3290, 2 pc. · 00-683155-00
has picture Valve, Quick Exhaust · 27-200020-00
has picture Valve, Assy. · 00-672217-00
has picture Valve, Needle Argon Station · 00-674766-00
has picture Solenoid, 24VDC · 00-684044-00
has picture Valves, Flow Control · 27-180478-00
Kit, Target · OPT-1491